| High speed tool transfer system |
Total stroke : 1000um or more |
Precitech |
FTS1000 |
| Form accuracy(P-V) : 1um or under |
| Surface finish (Ra) : 10um or under |
| Polishing machine |
X*Y*Z (400*200*200)mm |
KURODA |
KRP-2200F |
| Non-contact local surface measuring instrument |
Vertical Resolution : 0.1nm under |
VEECO |
NT2000 |
| Maximum measuring range : 100mm*100mm |
| Measuring width of numerical direction : 0.1nm-150um |
| Contact-type surface
roughness measuring
instrument |
Measuring Range : W*H (120mm*20mm) |
Taylor Hobson |
Form Taly-surf series2 |
| Degree of precision : 12.8nm /10mm |
| Laser interferometer |
Wave Length : 632.8nm |
VEECO |
WYKO6000 |
| Degree of precision : λ/100PV at 632.8nm |
| 5-axis compound milling machine |
Table and work area(X, Y, Z) : 820*300*450mm |
EXERON |
HSC600 |
| Table and work area : 1100*280mm |
| Main lateral line turning angle : +-90deg |
| Measurement range of Carl Zeiss 3D measuring instrument |
Measuring Range : X=700mm Y=700mm Z=600mm |
ZEISS |
Conture G2 |
| Measurement accuracy : MPE_E=1.8+L/300um,MPE_P=1.8um |
| Non-contact Optical profilometer |
Pixel array : 1024*1024 |
Taylor Hobson |
CCI-optics |
| RMS repeatability : <0.2Å |
| Step height repeatability : <0.1% |
| Machining Center Machine |
Table and work area(X, Y, Z) : 1020*540*530mm |
DOOSAN |
MYNX 5400 |
| Table and work area : 1020*540mm |
| Computerized Numerical Control Machine |
chuck : 8" |
DOOSAN |
PUM-AGT2100 |
| Maximum number of revolutions : 4500RPM |
| Work area(D/L) : Ø390*562mm |
| Helium Leak Detector |
Test Methodes : Vacuum and sniffing leak detection |
Adixen |
ASM142 |
| minimum detectable leak rate for He : 5.0*10-13 Pa m^3/s |
