1nm 깊이 방향 식각 분해 및 유기물 손상 없이 OLED 다층박막 분석이 가능한 Gas Cluster Ion Beam gun 모듈.
LEE, Sang Ju, et al. Development of an Argon Gas Cluster Ion Beam for ToF‐SIMS Analysis. Bulletin of the Korean Chemical Society, 2019, 40.9: 877-881.
TOYODA, Noriaki; YAMADA, Isao. Gas cluster ion beam equipment and applications for surface processing. IEEE Transactions on plasma science, 2008, 36.4: 1471-1488.