- Size : Ø 38 mm - Material : ZnSe
- Size : Ø 15 mm - Material : CaF2
- Size : Ø 150 mm - Material : oxygen-free electrolytic copper
- Size : 30*20 mm - Material : AL6061
Size : Ø 100 mm - Material : AL6061
- Material : Fused Silica1
- Size : Ø 100 mm - Material : Sapphire
- Size : Ø 150 mm - Material : Fused Silica
- Size : Ø 50 mm - Material : AL6061
- Size : Ø 300 mm - Material : AL6061
- Size : 300 * 200 mm - Material : Nickel Plated SUS316L
- Size : Ø 300 mm - Gap between patterns : about 38 nm, max 570 nm